VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Beryllium: BE (1s), BE of Cu(2p3) = 932.65 eV
1
0.05 eV/step, Sum of 15 repetitive etch/scans
NORM
REGULAR
1
0
0
0
0
0
1
0.05 eV/step, Sum of 15 repetitive etch/scans
Beryllium: BE (1s), BE of Cu(2p3) = 932.65 eV
2003
4
25
22
15
30
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.25
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
124
-0.05
2
counts
d
Transmission
d
pulse counting
0.1
60
4.00E-06
0
0
0
0
802
24
2476
0.380335
0.383116
164
0.383116
147
0.383109
135
0.383102
129
0.383095
154
0.383088
161
0.383081
167
0.383074
128
0.383067
163
0.38306
128
0.383053
135
0.383046
127
0.383039
140
0.383032
113
0.383025
129
0.383018
143
0.383011
135
0.383004
123
0.382997
132
0.38299
124
0.382983
122
0.382976
126
0.382969
155
0.382962
130
0.382955
126
0.382948
131
0.382941
149
0.382934
111
0.382927
121
0.38292
136
0.382913
139
0.382906
129
0.382899
135
0.382892
111
0.382885
129
0.382878
134
0.382871
127
0.382864
113
0.382857
136
0.38285
112
0.382843
156
0.382836
141
0.382829
126
0.382822
117
0.382815
100
0.382808
126
0.382801
136
0.382794
130
0.382787
106
0.38278
121
0.382772
106
0.382765
105
0.382758
133
0.382751
137
0.382744
131
0.382737
143
0.38273
114
0.382723
114
0.382716
147
0.382709
113
0.382702
115
0.382695
137
0.382688
104
0.382681
101
0.382674
120
0.382667
115
0.38266
114
0.382653
136
0.382646
101
0.382639
106
0.382632
115
0.382625
114
0.382618
130
0.382611
123
0.382604
96
0.382597
115
0.38259
117
0.382583
108
0.382576
109
0.382569
122
0.382562
118
0.382555
115
0.382548
116
0.382541
120
0.382534
109
0.382527
126
0.38252
112
0.382513
127
0.382506
121
0.382499
120
0.382492
121
0.382485
116
0.382478
121
0.382471
113
0.382464
110
0.382457
119
0.38245
109
0.382443
120
0.382436
117
0.382429
100
0.382422
121
0.382415
117
0.382408
109
0.382401
108
0.382394
113
0.382388
121
0.382381
113
0.382374
103
0.382367
79
0.38236
107
0.382353
92
0.382346
116
0.382339
121
0.382332
112
0.382325
123
0.382318
105
0.382311
128
0.382304
117
0.382297
104
0.38229
98
0.382283
104
0.382276
115
0.382269
105
0.382262
92
0.382255
99
0.382248
121
0.382241
96
0.382234
94
0.382227
94
0.38222
109
0.382213
106
0.382206
112
0.382199
102
0.382192
79
0.382185
113
0.382178
81
0.382171
115
0.382164
110
0.382157
107
0.38215
102
0.382143
103
0.382136
137
0.382129
108
0.382122
82
0.382115
111
0.382108
114
0.382101
105
0.382094
125
0.382087
93
0.38208
108
0.382073
112
0.382066
110
0.382059
104
0.382052
111
0.382046
102
0.382039
120
0.382032
97
0.382025
125
0.382018
117
0.382011
124
0.382004
112
0.381997
116
0.38199
105
0.381983
102
0.381976
110
0.381969
124
0.381962
114
0.381955
117
0.381948
114
0.381941
128
0.381934
103
0.381927
136
0.38192
117
0.381913
116
0.381906
115
0.381899
110
0.381892
141
0.381885
119
0.381878
111
0.381871
125
0.381864
128
0.381857
143
0.38185
122
0.381844
128
0.381837
136
0.38183
151
0.381823
126
0.381816
156
0.381809
117
0.381802
150
0.381795
137
0.381788
154
0.381781
168
0.381774
155
0.381767
139
0.38176
130
0.381753
123
0.381746
155
0.381739
138
0.381732
160
0.381725
167
0.381718
159
0.381711
154
0.381704
178
0.381697
175
0.381691
146
0.381684
162
0.381677
185
0.38167
181
0.381663
193
0.381656
198
0.381649
158
0.381642
170
0.381635
206
0.381628
166
0.381621
176
0.381614
198
0.381607
201
0.3816
195
0.381593
230
0.381586
222
0.381579
197
0.381572
241
0.381565
232
0.381559
252
0.381552
254
0.381545
300
0.381538
267
0.381531
293
0.381524
326
0.381517
299
0.38151
391
0.381503
439
0.381496
520
0.381489
622
0.381482
716
0.381475
913
0.381468
1079
0.381461
1408
0.381454
1678
0.381447
1895
0.381441
2083
0.381434
2366
0.381427
2476
0.38142
2425
0.381413
2337
0.381406
2259
0.381399
1882
0.381392
1785
0.381385
1534
0.381378
1289
0.381371
1129
0.381364
916
0.381357
783
0.38135
680
0.381343
572
0.381337
496
0.38133
380
0.381323
326
0.381316
256
0.381309
240
0.381302
188
0.381295
146
0.381288
139
0.381281
122
0.381274
110
0.381267
76
0.38126
88
0.381253
77
0.381246
61
0.381239
47
0.381233
45
0.381226
48
0.381219
43
0.381212
52
0.381205
50
0.381198
60
0.381191
55
0.381184
44
0.381177
47
0.38117
55
0.381163
50
0.381156
49
0.381149
38
0.381143
47
0.381136
47
0.381129
50
0.381122
54
0.381115
33
0.381108
60
0.381101
47
0.381094
51
0.381087
45
0.38108
55
0.381073
44
0.381066
59
0.38106
40
0.381053
45
0.381046
51
0.381039
50
0.381032
45
0.381025
47
0.381018
40
0.381011
45
0.381004
46
0.380997
38
0.38099
51
0.380983
38
0.380977
36
0.38097
45
0.380963
46
0.380956
43
0.380949
39
0.380942
54
0.380935
29
0.380928
39
0.380921
40
0.380914
47
0.380907
37
0.380901
35
0.380894
39
0.380887
43
0.38088
52
0.380873
40
0.380866
51
0.380859
30
0.380852
36
0.380845
37
0.380838
37
0.380832
33
0.380825
40
0.380818
38
0.380811
35
0.380804
42
0.380797
36
0.38079
34
0.380783
34
0.380776
34
0.380769
53
0.380762
24
0.380756
35
0.380749
45
0.380742
36
0.380735
35
0.380728
39
0.380721
39
0.380714
38
0.380707
32
0.3807
34
0.380693
43
0.380687
27
0.38068
32
0.380673
34
0.380666
33
0.380659
34
0.380652
33
0.380645
36
0.380638
42
0.380631
34
0.380625
40
0.380618
35
0.380611
35
0.380604
46
0.380597
36
0.38059
34
0.380583
39
0.380576
37
0.380569
54
0.380563
39
0.380556
43
0.380549
32
0.380542
33
0.380535
36
0.380528
41
0.380521
43
0.380514
45
0.380507
32
0.380501
41
0.380494
34
0.380487
40
0.38048
41
0.380473
35
0.380466
29
0.380459
41
0.380452
35
0.380445
42
0.380439
27
0.380432
35
0.380425
41
0.380418
47
0.380411
41
0.380404
36
0.380397
36
0.38039
32
0.380384
42
0.380377
36
0.38037
28
0.380363
39
0.380356
47
0.380349
54
0.380342
50
0.380335
end of experiment
